Processing apparatus and processing method

Details Processing apparatus and processing method Processing apparatus and processing method

1997-09-25

1999-10-12

Lusignan, Michael

Coating processes

Centrifugal force utilized

427345, 427350, 427353, 118 52, 118320, B05D 312

Patent

active

059652004

ABSTRACT:
A develop processing apparatus is provided for processing an object with a developing solution, comprising a retaining member for rotatably retaining the object, a developing solution supply nozzle for supplying the developing solution to the object, a developing solution sucking nozzle for sucking the developing solution supplied to the object, a developing solution supply nozzle moving mechanism for moving the developing solution supply nozzle above the object, a developing solution sucking nozzle moving mechanism for moving the developing solution sucking nozzle above the object. After the developing solution is supplied to the object subsequent to moving the developing solution supply nozzle, the developing solution sucking nozzle is moved and the developing solution on the object is sucked.

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