Processing apparatus and method using solution

Details Processing apparatus and method using solution Processing apparatus and method using solution

1998-06-05

2000-05-16

Bell, Janyce

Coating processes

Centrifugal force utilized

118 52, 118602, 118603, 427345, 4273855, 437231, B05D 312, B05C 1102

Patent

active

060634391

ABSTRACT:
A processing apparatus using solution comprises a rotary table which rotates while holding a substrate thereon, in the processing chamber provided in the casing, a supply mechanism for supplying a processing solution to a surface of the substrate held on the rotary table, and an impurity remover unit, provided outside the casing, wherein the impurity remover unit includes a cleaning unit for cleaning an object gas introduced from the inlet opening by brining it into contact with an impurity remover solution, and the gas-liquid separation mechanism for separating liquid from gas in an exhaust is provided in the exhaust system for exhausting the casing.

REFERENCES:
patent: 5945161 (1999-08-01), Hashimoto et al.

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