Processing apparatus

Details Processing apparatus Processing apparatus

1995-09-12

1997-12-09

Czaja, Donald E.

Coating apparatus

With indicating, testing, inspecting, or measuring means

118669, 118676, 250223R, B05C 1100

Patent

active

056955626

ABSTRACT:
A processing apparatus comprises a carrier rest portion for placing thereon carriers each of which stores a plurality of plate-like target bodies substantially horizontally with gaps therebetween in the vertical direction and which has a front surface forming a target body transfer port and a side surface having a light-transmitting portion, a convey mechanism having a target body holding member which is movable back and forth and movable vertically relative to the carrier rest portion to sequentially extract and transfer target bodies in the carrier to a processing unit, and photocoupler and a mirror, provided to the convey mechanism to oppose each other through part of the target body in the horizontal direction, for detecting presence/absence of a target body in each stage of the carrier on the carrier rest portion.

REFERENCES:
patent: 3902615 (1975-09-01), Levy et al.
patent: 5203445 (1993-04-01), Shiraiwa
patent: 5239182 (1993-08-01), Tateyama et al.
patent: 5406092 (1995-04-01), Mokuo

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