Cleaning and liquid contact with solids – Processes – Using sequentially applied treating agents
Reexamination Certificate
2008-06-30
2011-12-13
Kornakov, Michael (Department: 1714)
Cleaning and liquid contact with solids
Processes
Using sequentially applied treating agents
C134S002000, C134S003000, C438S004000
Reexamination Certificate
active
08075701
ABSTRACT:
A process for reconditioning a multi-component electrode comprising a silicon electrode bonded to an electrically conductive backing plate is provided. The process comprises: (i) removing metal ions from the multi-component electrode by soaking the multi-component electrode in a substantially alcohol-free DSP solution comprising sulfuric acid, hydrogen peroxide, and water and rinsing the multi-component electrode with de-ionized water; (ii) polishing one or more surfaces of the multi-component electrode following removal of metal ions there from; and (iii) removing contaminants from silicon surfaces of the multi-component electrode by treating the polished multi-component electrode with a mixed acid solution comprising hydrofluoric acid, nitric acid, acetic acid, and water and by rinsing the treated multi-component electrode with de-ionized water. Additional embodiments of broader and narrower scope are contemplated.
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International Search Report and Written Opinion dated Feb. 11, 2010 pertaining to International application No. PCT/US2009/048244.
Avoyan Armen
Fang Yan
Outka Duane
Shih Hong
Whitten Stephen
Blan Nicole
Dinsmore & Shohl LLP
Kornakov Michael
Lam Research Corporation
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