Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Reexamination Certificate
2007-05-15
2007-05-15
Lee, Sin (Department: 1752)
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Radiation sensitive composition or product or process of making
C430S326000, C430S905000, C430S914000, C556S437000, C556S440000
Reexamination Certificate
active
10378553
ABSTRACT:
The invention includes new Si-containing monomers, polymers containing such monomers and photoresists that contain the polymers. Synthetic methods of the invention include reacting a vinyl carbocyclic aryl ester compound with a reactive silane compound to provide the monomer.
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Barclay George G.
Kanagasabapathy Subbareddy
King Matthew A.
Corless Peter F.
Edwards Angell Palmer & & Dodge LLP
Frickey Darryl P.
Lee Sin
Shipley Company L.L.C.
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