Processes for fabricating conductive patterns using...

Details Processes for fabricating conductive patterns using... Processes for fabricating conductive patterns using...

2006-02-28

2006-02-28

Baumeister, B. William (Department: 2891)

Semiconductor device manufacturing: process

Coating with electrically or thermally conductive material

To form ohmic contact to semiconductive material

C438S646000, C438S626000, C438S647000, C438S929000, C438S644000, C438S675000

Reexamination Certificate

active

07005378

ABSTRACT:
Nanolithographic deposition of metallic nanostructures using coated tips for use in microelectronics, catalysis, and diagnostics. AFM tips can be coated with metallic precursors and the precursors patterned on substrates. The patterned precursors can be converted to the metallic state with application of heat. High resolution and excellent alignment can be achieved.

REFERENCES:
patent: 6146716 (2000-11-01), Narang
patent: 6271130 (2001-08-01), Rajh et al.
patent: 6325904 (2001-12-01), Peeters
patent: 6635311 (2003-10-01), Mirkin et al.
patent: 6737646 (2004-05-01), Schwartz
patent: 2004/0131843 (2004-07-01), Mirkin et al.

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