Process tolerant methods and apparatus for obtaining data

Details Process tolerant methods and apparatus for obtaining data Process tolerant methods and apparatus for obtaining data

2006-10-24

2006-10-24

Nghiem, Michael (Department: 2863)

Data processing: measuring, calibrating, or testing

Measurement system in a specific environment

Mechanical measurement system

Reexamination Certificate

active

07127362

ABSTRACT:
Data are collected for deriving response models and information required for developing and maintaining processes and process tools. Methods and apparatus for collecting the data include a process tolerant sensor apparatus capable of collecting data with less perturbation and fewer disruptions than is usually possible using standard methods.

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