Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
Patent
1993-06-18
1995-04-18
McCamish, Marion E.
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Making electrical device
430320, 430321, 430324, 430330, G03C 516
Patent
active
054077877
ABSTRACT:
A process for making thick metal structures on a substrate has the steps of: selectively exposing a thick layer of photoresist disposed on a substrate to ultraviolet radiation including the 350 nm to 450 nm portion of tile spectrum of a mercury vapor lamp, where the photoresist layer is a heat-treated arid hydrated photoresist layer, to fully pattern the substrate: developing the patterned substrate by contacting the photoresist layer with a photoresist developing solution; exposing the photoresist layer to a plasma for hardening the pattern against thermal flow; hardbaking the photoresist pattern on the substrate; plating the metal onto the patterned substrate using a low current density (J) during at least part of the plating process, making a thick methyl structure on the substrate.
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Englemann et al., "Fabrication of High Depth-to-Width Aspect Ratio Microsctures", Micro Electrical Mechanical Systems '92 pp. 93-98 (Feb. 4-7, 1992).
Enthone-OMI, Sel-Rex.RTM. Technical Data Sheet, Sel-Rex.RTM. Pur-A-Gold.RTM. 402.
Ma, "Plasma resist image stabilization technique (PRIST) update", SPIE 333 pp. 19-23 (1982).
Hoechst Inc., "AZ.RTM. 4000 Series Photoresists: For Thick Film Applications", Product Brochure.
Hoechst Inc., "AZ.RTM. 4903 Photoresist for Ultra-Thick Film Applications", Product Brochure.
Lochel et al., "Fabrication of Magnetic Microstructures by Using Thick Layer Resists", Suss Report pp. 7-9 (1992).
Burns William K.
Gopalakrishnan Ganesh K.
McElhanon Robert W.
Duda Kathleen
Karasek John J.
McCamish Marion E.
McDonnell Thomas E.
The United States of America as represented by the Secretary of
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