Process of treating SOG layer using end-point detector for outga

Details Process of treating SOG layer using end-point detector for outga Process of treating SOG layer using end-point detector for outga

1994-10-11

1995-05-09

Fourson, George

Fishing, trapping, and vermin destroying

437189, 437231, H01L 21316, H01L 213213

Patent

active

054139406

ABSTRACT:
Disclosed is a method of integrated circuit manufacture involving a method for optimizing the time needed to outgas a layer of spin-on-glass. A layer of spin-on-glass that was previously covered over may be exposed again as a result of subsequent processing. It is necessary to subject such a layer to an outgassing treatment by heating it in vacuum prior to the deposition of a metal film which could react with any ougassed material that was not already removed. To avoid having to heat the integrated circuit for any longer than is absolutely necessary during outgassing, the partial pressure of the outgassed material is monitored by means of a residual gas analyzer whose output is used to control the outgassing process.

REFERENCES:
patent: 4938847 (1990-07-01), Andrews, Jr. et al.
patent: 5003062 (1991-03-01), Yen
patent: 5106787 (1992-04-01), Yen
patent: 5174043 (1992-12-01), Yen
patent: 5364818 (1994-11-01), Ouellet
patent: 5372673 (1994-12-01), Stoger et al.

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