Process of production of integrated optical components

Details Process of production of integrated optical components Process of production of integrated optical components

1992-11-25

1993-12-21

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156647, 156657, 156662, H01L 21306, B44C 122, C03C 1500, C23F 100

Patent

active

052718018

ABSTRACT:
The invention relates to a process of production of integrated optical components on a substrate making it possible to combine microguides, separating plates, lenses, diopters. The process consists, for this purpose, in producing a first mask having patterns of given shapes and sizes; performing an anisotropic etching of the substrate not protected by the mask to obtain cavities (20) with vertical walls; eliminating the mask; performing a thermal oxidation of the vertical walls to constitute barrier layers (31) and the mask being used for the etching of the main phase, then in producing a mask (12) having patterns of given shapes and sizes; performing an etching of the substrate not protected by the mask to obtain at least one cavity (13) of desired shape; performing a thermal oxidation to form a peripheral layer (15, 16a, 16, 16c) of given thickness on a part or over the entire inside surface of the cavities; performing a filling (17, 18) of the cavities by a suitable material.

REFERENCES:
patent: 5032220 (1991-07-01), Yamamoto et al.
"Optical waveguides fabricated by preferential etching", Applied Optics, vol. 14, No. 5, May, 1975, pp. 1200-1206, Won-Tieng Tsang et al.

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