Process of manufacturing fluid jetting apparatuses

Details Process of manufacturing fluid jetting apparatuses Process of manufacturing fluid jetting apparatuses

2005-05-24

2005-05-24

Tugbang, A. Dexter (Department: 3729)

Metal working

Method of mechanical manufacture

Electrical device making

C029S890100, C029S417000, C347S056000, C347S061000, C347S062000, C156S248000, C156S250000, C427S240000, C427S407100

Reexamination Certificate

active

06895659

ABSTRACT:
A manufacturing process in which a plurality of fluid jetting apparatuses are formed includes forming and sequentially adhering a heat driving part, a membrane and a nozzle part, respectively. The fluid jetting apparatuses are completed as a wafer unit by forming the nozzle part by forming a nozzle plate on a substrate of a wafer by a spinning process; forming jetting fluid barriers on the nozzle plate by the spinning process; forming jetting fluid chambers in the jetting fluid barriers; forming nozzles in the nozzle plate; and separating the substrate from the nozzle plate after the nozzle part and the membrane are adhered to each other. The forming jetting fluid chambers is accomplished by a process of wet etching, and the forming nozzles is accomplished by a treating apparatus of a laser beam or by a process of reactive ion etching.

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