Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent
1993-03-24
1999-02-23
Nguyen, Nam
Chemistry: electrical and wave energy
Processes and products
Coating, forming or etching by sputtering
20419224, 505162, 505477, 505702, C23C 1434
Patent
active
058739858
ABSTRACT:
An oxide film having a desired pattern is first formed on a magnesia substrate. A superconducting oxide film is then formed on the exposed portion of the magnesia substrate and also on the oxide film. Thus, a tilt-boundary junction is formed in the boundary between the superconducting oxide film portion on the magnesia substrate and the superconducting oxide film portion on the oxide film. The tilt-boundary junction functions as a Josephson junction. By utilizing the Josephson junction in the tilt-boundary junction, a SQUID pattern can be formed on the magnesia substrate to provide a SQUID device.
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Fujiwara Shuji
Furukawa Hiroaki
Nakao Masao
Tokunaga Seiichi
Yuasa Ryokan
Nguyen Nam
Sanyo Electric Co,. Ltd.
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