Semiconductor device manufacturing: process – Packaging or treatment of packaged semiconductor – Assembly of plural semiconductive substrates each possessing...
Reexamination Certificate
2011-06-21
2011-06-21
Smoot, Stephen W (Department: 2813)
Semiconductor device manufacturing: process
Packaging or treatment of packaged semiconductor
Assembly of plural semiconductive substrates each possessing...
C438S122000, C257SE21505, C977S847000
Reexamination Certificate
active
07964447
ABSTRACT:
A carbon nanotube (CNT) array is patterned on a substrate. The substrate can be a microelectronic die or a heat sink for a die. The patterned CNT array is patterned by using a patterned catalyst on the substrate to form the CNT array by growing. The patterned CNT array can also be patterned by using a patterned mask on the substrate to form the CNT array by growing. A computing system that uses the CNT array for heat transfer from the die is also used.
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Chrysler Gregory M.
Dory Thomas S.
Maveety James G.
Prack Edward
Vadakkanmaruveedu Unnikrishnan
Greaves John N.
Intel Corporation
Smoot Stephen W
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