Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
Patent
1982-04-12
1984-10-23
Brammer, Jack P.
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Making electrical device
427 96, 430313, 430277, G03C 500
Patent
active
044789327
ABSTRACT:
A resist film composed of a water-soluble polyvinyl alcohol, a water-soluble thermosetting polymethylol cross-linking agent and a polyaryl iodonium or sulfonium salt of a complex halogenide as catalyst, when irradiated with ultraviolet light and then heated, or when heated and irradiated with ultraviolet light, under a circuit mask, provides a latent image which is developable by water alone.
REFERENCES:
patent: 4026705 (1977-05-01), Crivello et al.
patent: 4090935 (1978-05-01), Barton
patent: 4138255 (1979-02-01), Crivello
patent: 4161478 (1979-07-01), Crivello
Photoresist Materials and Processes, by W. S. DeForest, (McGraw-Hill Book Co., New York, N.Y., 1975).
Keane John J.
Zopf Richard F.
Brammer Jack P.
General Electric Company
Voss Donald J.
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