Process of making a microtube and microfluidic devices...

Details Process of making a microtube and microfluidic devices... Process of making a microtube and microfluidic devices...

2008-04-01

2008-04-01

Lebentritt, Michael (Department: 2812)

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

Physical stress responsive

C438S051000, C438S052000, C438S053000, C438S456000, C257SE21001

Reexamination Certificate

active

07351603

ABSTRACT:
A process for producing a tube suitable for microfluidic devices. The process uses a uniformly-doped first material having a first portion into which a channel is etched partially through the first material between second and third portions of the first material. The first material is then bonded to a second material so that a first portion of the second material overlies the first portion of the first material and encloses the channel to define a passage. The second and third portions of the second material and part of the second and third portions of the first material are then removed, and the first portion of the second material is bonded to a substrate such that the passage projects over a recess in the substrate surface. The second and third portions of the first material are then removed to define a tube with a freestanding portion.

REFERENCES:
patent: 4975390 (1990-12-01), Fujii et al.
patent: 5543349 (1996-08-01), Kurtz et al.
patent: 6477901 (2002-11-01), Tadigadapa et al.
patent: 6647778 (2003-11-01), Sparks
patent: 6935010 (2005-08-01), Tadigadapa et al.
patent: 2006/0175303 (2006-08-01), Sparks et al.

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