Process of fabricating an enlongated microstructure element on a

Details Process of fabricating an enlongated microstructure element on a Process of fabricating an enlongated microstructure element on a

1993-11-04

1995-08-08

Chaudhuri, Olik

Etching a substrate: processes

Etching of semiconductor material to produce an article...

437228, B44C 122

Patent

active

054395526

ABSTRACT:
The invention concerns a fabrication process of at least one generally elated structural element (14) on a substrate (12) in a first material and having a substantially flat upper face (13), said element (14) realized in a second material comprising at least a first wing (14a) parallel to a plan perpendicular to said upper face (13).

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