Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2006-06-06
2006-06-06
Picard, Leo (Department: 2125)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C700S110000, C438S009000
Reexamination Certificate
active
07058467
ABSTRACT:
A monitor data acquisition section acquires a plurality of monitor data relating to a processing state of one sample in a processing apparatus, via sensors. A data selection section selects monitor data belonging to an arbitrary processing division included in a plurality of processing divisions for the sample, from among the plurality of monitor data. A monitoring signal generation section generates monitoring signals based on the monitor data belonging to the arbitrary processing division selected by the data selection section. A display setting controller displays a plurality of monitoring signals obtained with respect to samples processed in the processing apparatus, on a display section in a time series manner.
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Ikuhara Shoji
Kitsunai Hiroyuki
Takahashi Kazue
Tanaka Junichi
Yamamoto Hideyuki
Antonelli, Terry Stout and Kraus, LLP.
Hitachi , Ltd.
Kosowski Alexander
Picard Leo
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