Process for treating solid surface and substrate surface

Details Process for treating solid surface and substrate surface Process for treating solid surface and substrate surface

2007-09-04

2007-09-04

Olsen, Allan (Department: 1763)

Cleaning and liquid contact with solids

Processes

For metallic, siliceous, or calcareous basework, including...

C134S021000, C134S022100, C216S037000, C216S076000, C216S077000

Reexamination Certificate

active

11252786

ABSTRACT:
Ruthenium, osmium and their oxides can be etched simply and rapidly by supplying an atomic oxygen-donating gas, typically ozone, to the aforementioned metals and their oxides through catalysis between the metals and their oxides, and the ozone without any damages to wafers and reactors and application of the catalysis not only to the etching but also to chamber cleaning ensures stable operation of reactors and production of high quality devices.

REFERENCES:
patent: 4747907 (1988-05-01), Acocella et al.
patent: 5236550 (1993-08-01), Abt et al.
patent: 5254217 (1993-10-01), Maniar et al.
patent: 5382320 (1995-01-01), Desu et al.
patent: 5407855 (1995-04-01), Maniar et al.
patent: 5624583 (1997-04-01), Tokashiki et al.
patent: 5883781 (1999-03-01), Yamamichi et al.
patent: 5888857 (1999-03-01), Zhang et al.
patent: 5972722 (1999-10-01), Visokay et al.
patent: 6008135 (1999-12-01), Oh et al.
patent: 6136767 (2000-10-01), Hineman et al.
patent: 6432835 (2002-08-01), Yunogami et al.
patent: 6436723 (2002-08-01), Tomita et al.
patent: 6495054 (2002-12-01), Eguchi et al.
patent: 6537461 (2003-03-01), Nakahara et al.
patent: 6592771 (2003-07-01), Yamanaka et al.
patent: 6613242 (2003-09-01), Nakahara et al.
patent: 6659111 (2003-12-01), Mouri et al.
patent: 6673262 (2004-01-01), Mori et al.
patent: 2001/0006245 (2001-07-01), Yunogami et al.
patent: 2001/0023701 (2001-09-01), Aoki et al.
patent: 6-283438 (1994-10-01), None
patent: 7-157832 (1995-06-01), None
patent: 8-78396 (1996-03-01), None
patent: 9-246214 (1997-09-01), None
patent: 2001/068463 (2001-03-01), None
R. Loessberg, et al., “Eine Methode zur Synthese von wasserfreiem Ruthenium (VIII)-oxid”, in Zeitschrift Fuer Naturforschung, Section B, Chemical Sciences, vol. 16B, No. 3, 1981, p. 395.
Patent Abstracts of Japan, Pub. No. 08-153707 (Jun. 11, 1996).

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