4. Etching a substrate: processes
  5. Gas phase etching of substrate
  6. Application of energy to the gaseous etchant or to the...

Kazuto Watanabe

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Method for manufacturing semiconductor device having an...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Process for treating solid surface and substrate surface

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Process for treating solid surface and substrate surface

Cleaning and liquid contact with solids – Processes – For metallic – siliceous – or calcareous basework – including...
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Process for treating solid surface and substrate surface

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
Reexamination Certificate

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Process for treating solid surface and substrate surface

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
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