Process for treating semiconductor material with an acid-contain

Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step

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252 792, 252 793, H01L 2100

Patent

active

055870465

ABSTRACT:
A process for treating semiconductor material with an acid-containing fluid, has water being formed as a product of a chemical reaction. Before and/or during the treatment of the semiconductor material, phosphorus pentoxide is added to the acid-containing fluid.

REFERENCES:
patent: 3923567 (1975-12-01), Lawrence
patent: 3971683 (1976-07-01), Briska et al.
Patent Abstracts of Japan JP-A-55154452.
Derwent Abstract of JP-A-55154452.

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