Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent
1995-04-10
1996-12-24
Powell, William
Adhesive bonding and miscellaneous chemical manufacture
Delaminating processes adapted for specified product
Delaminating in preparation for post processing recycling step
252 792, 252 793, H01L 2100
Patent
active
055870465
ABSTRACT:
A process for treating semiconductor material with an acid-containing fluid, has water being formed as a product of a chemical reaction. Before and/or during the treatment of the semiconductor material, phosphorus pentoxide is added to the acid-containing fluid.
REFERENCES:
patent: 3923567 (1975-12-01), Lawrence
patent: 3971683 (1976-07-01), Briska et al.
Patent Abstracts of Japan JP-A-55154452.
Derwent Abstract of JP-A-55154452.
Romeder Peter
Schwab Gunter
Stadler Maximilian
Trifellner Gabriele
Powell William
Wacker Siltronic Gesellschaft fur Halbleitermaterialien
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