Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
Patent
1991-08-07
1994-05-31
King, Roy V.
Coating processes
Direct application of electrical, magnetic, wave, or...
Plasma
427570, 427573, 4272552, 4272551, 427523, 20419215, 20429819, 20429821, B05D 306, C23C 1434
Patent
active
053168046
ABSTRACT:
There can be provided a novel and useful process for the synthesis of hard boron nitride consisting essentially of single phase cubic boron nitride by a gaseous phase synthesis technique, which comprises adding a F atom-containing gas to the gaseous phase or adding a F atom-containing gas and H atom-containing gas to the gaseous phase, whereby the codeposited hexagonal boron nitride can selectively be etched and hard boron nitride of substantially single phase can finally be synthesized.
REFERENCES:
patent: 4412899 (1983-11-01), Beale
patent: 4565747 (1986-01-01), Nakae et al.
patent: 4683043 (1987-07-01), Melton et al.
patent: 4762729 (1988-08-01), Hirano et al.
patent: 4973494 (1990-11-01), Yamazaki
patent: 5096740 (1992-03-01), Nakagama et al.
Fujita Nobuhiko
Nakagama Shyoji
Nakayama Akira
Tomikawa Tadashi
King Roy V.
Sumitomo Electric Industries Ltd.
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