Abrasive tool making process – material – or composition – With carbohydrate or reaction product thereof
Patent
1984-12-10
1992-07-28
Rose, Robert A.
Abrasive tool making process, material, or composition
With carbohydrate or reaction product thereof
51283R, 51328, 51 7, 51413, 148240, 72 53, 437225, B24B 3100
Patent
active
051331608
ABSTRACT:
The invention relates to an improved method for removing point defects and oint defect clusters from semiconductor discs, which defects impair the quality of electronic components or structural elements made from such discs. According to the invention, prior to polishing, the semiconductor discs are immersed in a bath containing grains moving in a streaming carrier medium of the bath. One side of the discs are then polished and thereafter the discs are subjected to oxidation processes whereby stacking faults are induced in the rear side of the discs. These stacking faults have an excellent gettering effect on the point defects.
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Lampert Ingolf
Wahlich Reinhold
Rose Robert A.
Wacker-Chemitronic Gesellschaft fur Elektronik-Grundstoffe m.b.H
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