Process for the removal of specific crystal structure defects fr

Details Process for the removal of specific crystal structure defects fr Process for the removal of specific crystal structure defects fr

1976-07-23

1977-08-16

Ozaki, G.

Metal treatment

Compositions

Heat treating

148 33, 148187, H01L 21322, H01L 21324

Patent

active

040424197

ABSTRACT:
Process of the removal of point defects and point defect agglomerates from emiconductor discs, which comprises the steps of providing one side of the discs with a mechanical stress field and then subjecting the discs to a heat treatment.

REFERENCES:
patent: 3701696 (1972-10-01), Mets
patent: 3830668 (1974-08-01), Dearnaley et al.
patent: 3929529 (1975-12-01), Poponiak
patent: 3933530 (1976-01-01), Mueller et al.
patent: 3997368 (1976-12-01), Petroff et al.

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