Process for the removal of a silicon coating from a surface

Details Process for the removal of a silicon coating from a surface Process for the removal of a silicon coating from a surface

1992-10-06

1994-10-25

Breneman, R. Bruce

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

134 2211, 134 8, 134 1, 134 3, 156643, 156646, 156345, H01L 21312

Patent

active

053586034

ABSTRACT:
This invention relates to a process for etching a silicon coat on the inside wall of a tube. The tube may be a product discharge tube associated with a fluidized bed reactor used in the thermal production of silicon from a silicon containing compound, e.g., silane. The process features: a) heating the silicon coat to a temperature within the range of from about 500.degree. to about 750.degree. C., such heating occurring principally with radiant heat from a heating means inserted within the interior of the tube; and (b) contacting the heated silicon coat with a mineral acid which etches the heated silicon coat.

REFERENCES:
patent: 3042494 (1962-07-01), Gutsche
patent: 4444812 (1984-04-01), Gutsche
patent: 4529474 (1985-07-01), Fujiyama
patent: 4558660 (1985-12-01), Nishizawa
patent: 4576698 (1986-03-01), Gallagher
patent: 4657616 (1987-04-01), Benzing
patent: 4786352 (1988-11-01), Benzing
patent: 5109562 (1992-05-01), Albrecht

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