Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate – Polycrystalline semiconductor
Patent
1998-03-12
2000-11-28
Smith, Matthew
Semiconductor device manufacturing: process
Formation of semiconductive active region on any substrate
Polycrystalline semiconductor
438478, 438365, 438482, 438532, C30B 1512
Patent
active
06153496&
ABSTRACT:
The present invention relates to a process for the production of polycrystalline silicon mouldings substantially free of low lifetime edge regions and the use of these mouldings.
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Hassler Christian
Liebermann Johannes
Bayer AG
Lee, Jr. Granvill D.
Smith Matthew
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