Process for the production of nitrogen trifluoride

Details Process for the production of nitrogen trifluoride Process for the production of nitrogen trifluoride

2006-05-16

2006-05-16

Langel, Wayne A. (Department: 1754)

Chemistry of inorganic compounds

Nitrogen or compound thereof

Binary compound

C423S483000

Reexamination Certificate

active

07045107

ABSTRACT:
The present invention is directed to an improved reaction process that allows for the achievement of excellent NF3production yields, while minimizing the amount of unreacted fluorine exiting with the process gases and minimizing the amount of liquid melt waste (HF/NH3) produced by the process. The basic NF3process resides in reacting F2with an ammonium ion source, e.g., ammonium acid fluoride, under conditions for forming NF3. The improvement in the process comprises:introducing F2and said ammonium ion source cocurrently and downflow through a packed column or monolith column at a first temperature;reacting said F2and ammonium ion source in said column; and,removing a mixture of NF3and byproducts from said column at a second temperature higher than said first temperature.

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