Process for the production of functional crystalline film

Details Process for the production of functional crystalline film Process for the production of functional crystalline film

1990-01-22

1994-03-15

Kunemund, Robert

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156613, 156614, 437 85, 437 95, C30B 2514

Patent

active

052942856

ABSTRACT:
There is provided an improved process of forming a functional epitaxial film by using two kinds of active species and chemically reacting them.
One of the species is an activated substance which contains silicon atoms or germanium atoms and halogen atoms. The other species is one which is generated from a chemical substance capable of contributing to formation of a film and chemically reactive with the former active species.

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