Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
Patent
1989-06-16
1992-03-24
Bowers, Jr., Charles L.
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Making electrical device
430198, 430330, G03C 500
Patent
active
050988158
ABSTRACT:
Apertures with inclined sidewalls are produced in a dielectric layer by exposing a photoformable dielectric layer through a mask having a section without a sharp line of demarcation between opaque and transparent areas.
REFERENCES:
patent: 4912022 (1990-03-01), Urquhart et al.
Watanabe et al., "Thick Film Fine Pattern Formation . . . ", Conf: Proceedings 29th Electronic Component Conf., N.J., May 1979.
Adamczyk Andrzej
Delaney William E.
Bowers Jr. Charles L.
E. I. Du Pont de Nemours and Company
Pezzner Ashley I.
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