Process for the manufacture of precision templates

Details Process for the manufacture of precision templates Process for the manufacture of precision templates

1979-06-11

1981-04-28

Louie, Jr., Won H.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making named article

430324, 430394, 430396, G03C 500

Patent

active

042647142

ABSTRACT:
A process for the manufacture of precision flat parts such as masks, templates, and the like having very small openings therein with high contour details yet with substantial material thickness utilizes a metallized glass carrier having a stencil etched thereon with a negative working photo resist laminated on it. Exposure of photo resist is achieved through the glass so that maximum intensity of light in the photo resist occurs at the juncture between the photo resist and the glass carrier for maximum adhesion. Irregularly shaped apertures can be generated by selective varied orientation of the glass carrier during the exposure.

REFERENCES:
patent: 2559389 (1951-07-01), Beeber et al.
patent: 3507654 (1970-04-01), Wrench
patent: 4115120 (1978-09-01), Dyer et al.

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