Process for stripping color filter arrays from substrates

Details Process for stripping color filter arrays from substrates Process for stripping color filter arrays from substrates

1988-10-28

1990-01-09

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

134 3, 156668, 252 792, 430329, B44C 122, C03C 1500, C03C 2506, B29B 3700

Patent

active

048926167

ABSTRACT:
A process for stripping a color filter array coating from a substrate of a solid-state color image sensing device to recover the substrate so that it subsequently can be used to produce another solid-state color image sensing device, such process comprising contacting the coating with a stripping solution comprising chromic acid and sulfuric acid for a time effective to remove the coating from the substrate. The process efficiently removes all of the coating, even when the coating has been baked and hardened by various processing steps, and does not adversely affect the electrical properties of the device, the exposed bond pads, or the backside of the wafer.

REFERENCES:
patent: 4315978 (1982-02-01), Hartman
patent: 4355087 (1982-10-01), Martin
patent: 4764670 (1988-08-01), Pace et al.
The Chemist's Companion, Arnold J. Gordon and Richard A. Ford, Editors, John Wiley and Sons, New York, 1972, pp. 428-429.
Lelah et al, "The Wettability of Soda-Lime Glass: The Effect of Cleaning Procedures", Ceramic Bulletin, vol. 58, No. 11 (1979), pp. 1121-1124.

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