Process for smoothing surfaces of crystalline materials

Details Process for smoothing surfaces of crystalline materials Process for smoothing surfaces of crystalline materials

1977-07-25

1982-07-13

Bernstein, Hiram

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156646, 204192EC, C30B 2308

Patent

active

043393004

ABSTRACT:
A process for smoothing surfaces of crystalline materials such as sapphire or the like is disclosed which is capable of producing surfaces which are near atomically smooth. The process comprises the steps of substantially atomically removing crystalline material from the surface to be smoothed at a given rate and simultaneously substantially atomically depositing crystalline material on the surface to be smoothed at an independently controlled rate not greater than the given rate of removal. Various embodiments of the process are described in which combinations of evaporation, sputtering, gaseous chemical reaction and reflection of removed material are used to provide the substantially atomic removal and deposition of materials according to this invention.

REFERENCES:
patent: 3753775 (1973-08-01), Robinson et al.
patent: 3941672 (1976-03-01), Tanaka et al.
patent: 4038117 (1977-07-01), Noble et al.

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