Process for selectively etching diamond

Details Process for selectively etching diamond Process for selectively etching diamond

1992-08-31

1994-08-02

Hearn, Brian E.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156643, 437 24, 437 25, 437 26, 437226, 437944, 437974, H01L 21312

Patent

active

053342836

ABSTRACT:
A process for selectively etching a diamond substrate comprising the steps of forming a graphitic area within a diamond substrate and selectively etching the diamond substrate with a gaseous reactant under conditions sufficient to convert the graphitic area to a gaseous product, preferably while substantially avoiding reacting with the diamond of the diamond substrate. The technique can be used to form a single crystal diamond layer, for example, using a lift-off technique.

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