Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent
1989-06-30
1992-03-31
Simmons, David A.
Adhesive bonding and miscellaneous chemical manufacture
Delaminating processes adapted for specified product
Delaminating in preparation for post processing recycling step
156646, 156657, 156662, 427 99, 427123, 437203, 437238, 437241, 437245, H01L 2100
Patent
active
051005018
ABSTRACT:
A process for selectively depositing a contacting material (20) in trenches (18) for a via or contact which selectively eliminates potential metal contaminants (22) by removing a sacrificial layer (16) after the material (20) is selectively deposited. Initially, the trenches (18) are formed by selectively exposing the substrate (10) to an etchant (19). After metal material (20) is deposited into the formed trenches (18), a chemical etchant (24) is used to remove the sacrificial layer (16) and any formed contaminants (22).
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Blumenthal Roc
Gale Rebecca J.
Braden Stanton C.
Dang Thi
Donaldson Richard L.
Hiller William E.
Simmons David A.
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