Process for removing seams in tungsten plugs

Details Process for removing seams in tungsten plugs Process for removing seams in tungsten plugs

1996-06-21

1997-10-14

Bowers, Jr., Charles L.

Fishing, trapping, and vermin destroying

437195, 437190, 437203, 437246, H01L 2144

Patent

active

056772378

ABSTRACT:
A method for fabricating seamless, tungsten filled, small diameter contact holes, has been developed. The process features initially creating a tungsten plug, in the small diameter contact hole, and filling or repairing, seams or voids in the tungsten plug, with an additional layer of selectively deposited tungsten.

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