Process for removing seams in tungsten plugs

Fishing – trapping – and vermin destroying

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

437195, 437190, 437203, 437246, H01L 2144

Patent

active

056772378

ABSTRACT:
A method for fabricating seamless, tungsten filled, small diameter contact holes, has been developed. The process features initially creating a tungsten plug, in the small diameter contact hole, and filling or repairing, seams or voids in the tungsten plug, with an additional layer of selectively deposited tungsten.

REFERENCES:
patent: 4441247 (1984-04-01), Gargini et al.
patent: 4532702 (1985-08-01), Gigante et al.
patent: 5200360 (1993-04-01), Bradbury et al.
patent: 5212118 (1993-05-01), Saxena
patent: 5305519 (1994-04-01), Yamamoto et al.
patent: 5332691 (1994-07-01), Kinoshita et al.
patent: 5387550 (1995-02-01), Cheffings et al.
patent: 5407698 (1995-04-01), Emesh
patent: 5422308 (1995-06-01), Nicholls et al.
patent: 5422310 (1995-06-01), Ito
patent: 5502008 (1996-03-01), Hayakawa et al.
patent: 5527736 (1996-06-01), Huang et al.
patent: 5587339 (1996-12-01), Wyborn et al.
patent: 5622894 (1997-04-01), Jang et al.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Process for removing seams in tungsten plugs does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Process for removing seams in tungsten plugs, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Process for removing seams in tungsten plugs will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-1554936

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.