Process for removing gaseous contaminating compounds from carrie

Details Process for removing gaseous contaminating compounds from carrie Process for removing gaseous contaminating compounds from carrie

1990-12-20

1991-09-24

Spitzer, Robert

Gas separation

Means within gas stream for conducting concentrate to collector

55 71, 55 72, 55 75, B01D 5304

Patent

active

050511173

ABSTRACT:
A process for removing contaminants, particularly dopant, from halosilane-containing carrier gases, such as those which are produced in the production of high-purity silicon. The process of the invention is perferably carried out with aid of zeolites which has a low proportion of aluminum and are used in the anhydrous state by bringing the zeolites into contact with the carrier gases. Zeolites, after use, can be regenerated and re-used by increasing the temperature and/or decreasing the pressure of the procedure.

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Kirk-Othmer, Encyclopedia of Chemical Technology, title page and pp. 123-, third edition, vol. 8.

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