Plastic and nonmetallic article shaping or treating: processes – Laser ablative shaping or piercing
Patent
1993-09-15
1996-03-05
Vargot, Mathieu D.
Plastic and nonmetallic article shaping or treating: processes
Laser ablative shaping or piercing
134902, 264233, 264482, 427535, 437946, H01L 21304
Patent
active
054965063
ABSTRACT:
A process for detecting fine particles includes the steps of forming a sublimable thin film on an essential surface of a wafer on which fine particles are present, irradiating laser beam at the surface of the wafer, receiving a reflected beam from the surface which is scattered by the presence of the fine particles, and detecting the particles from the received scattered beam. The process may further include the step of accomplishing an etchback against the sublimable film to partially retain the sublimable film adjacent the surface of the fine particles. The film can be prepared from one or a mixture of gases including free sulfur generatable gas under discharge-dissociation conditions. Sulfur compounds or polythiazyl are preferable. Alternatively, the film can be made of a condensed film of organic solvent vapor. The sublimable film is sublimed by heating after the step of detecting the fine particles.
Sony Corporation
Vargot Mathieu D.
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