Process for removing a coating containing niobium from a substra

Details Process for removing a coating containing niobium from a substra Process for removing a coating containing niobium from a substra

1989-08-17

1990-08-21

Stoll, Robert L.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156640, 156656, 156664, 252 795, 204 321, 204 351, 204146, 423 62, 423 68, 427352, 134 2, 134 1, 134 42, H01L 21306

Patent

active

049503596

ABSTRACT:
Cleaning baths for the removal of a coating containing niobium on a substrate, consisting of an aqueous solution of hydrogen peroxide and of alkali metal hydroxide. The coating is treated with the bath, to remove it from the substrate by dissolving.

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Basic Abstracts Journal, Section L, Week D. 19, Derwent Publications Ltd., London, abstract 33525D-L: Patent Application JP-A-56-029, 324 (Tokyo Shibaura Elec. Ltd.).

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