Process for providing a glass dielectric layer on an electricall

Details Process for providing a glass dielectric layer on an electricall Process for providing a glass dielectric layer on an electricall

1996-08-14

1999-01-26

Fleming, Fritz

Electricity: electrical systems and devices

Electric charge generating or conducting means

Use of forces of electric charge or field

279128, H02N 1300

Patent

active

058644598

ABSTRACT:
Processes for providing a durable glass dielectric layer on an electrically conductive substrate are disclosed. Also disclosed are electrostatic chucks made by the process that include an electrically conductive substrate coated with a layer of glass having a composition that includes 60 wt. % to 80 wt. % SiO.sub.2.

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