Process for protecting polished silicon surfaces

Details Process for protecting polished silicon surfaces Process for protecting polished silicon surfaces

1986-10-24

1988-02-09

Page, Thurman K.

Coating processes

With pretreatment of the base

427301, 427387, B05D 300

Patent

active

047241713

ABSTRACT:
In a process for protecting polished silicon surfaces, after an oxidative eaning is carried out, the surface is coated with a protective layer by the action of a reagent especially hexamethyldisilazane which permits trialkylsilylation. The layer prevents aging of the oxide layer even over several months storage. Before subsequent processing steps, the protective layer can easily be removed again by thermal oxidation, without forming interfering by-products.

REFERENCES:
patent: 4562091 (1985-12-01), Sachdev et al.
patent: 4584205 (1986-04-01), Chen et al.
patent: 4606935 (1986-08-01), Blum
patent: 4678688 (1987-07-01), Itoh et al.

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