Process for producing vias in semiconductor

Details Process for producing vias in semiconductor Process for producing vias in semiconductor

1989-01-03

1990-01-16

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156633, 156644, 156652, 1566591, 156662, 20419217, 357 41, 357 81, 437203, 437209, 437902, H01L 21306, B44C 122, C03C 1500, C03C 2506

Patent

active

048941140

ABSTRACT:
An improved phased-array active antenna transmit-receive means utilizing a multiplicity of individual transmit-receive cells positioned in an array format upon a common wafer of semiconductor material. Each transmit-receive cell, comprises a multiplicity of redundant, integrated circuit, electronic devices implanted upon the common semiconductor substrate. The transmit-receive cells utilize novel mitered mechanical switches to permanently interconnect individual electronic devices into either transmit or receive circuits during the fabrication and test of the transmit-receive cells. Radio frequency and direct current input and output vias formed from a novel metal evaporation technique connect the devices upon the surface of the common semiconductor wafer to underlying, insulated direct current distribution circuits and a radio frequency manifold. This array of improved phased-array active antenna transmit-receive means comprised of transmit-receive cells sharing common central processing means, logic control and heat dissipation means results in a significant reduction in the size and weight of the standard phased-array active antenna system. This significant reduction in antenna system size and weight is very important in broad band electronic countermeasure systems or narrow band phased array active antenna radar systems as used in advanced tactical fighters, or space applications.

REFERENCES:
patent: 3343256 (1967-09-01), Smith et al.
patent: 4339870 (1982-07-01), Ball et al.
patent: 4426768 (1984-01-01), Black et al.
patent: 4559695 (1985-12-01), Baker

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