Process for producing semiconductor materials and metals of high

Details Process for producing semiconductor materials and metals of high Process for producing semiconductor materials and metals of high

1978-11-24

1980-07-29

Smith, John D.

Coating processes

Electrical product produced

Welding electrode

219482, 219483, 219494, 427 51, 427 86, 427252, B05D 512, B05D 314

Patent

active

042151546

ABSTRACT:
A process for producing high purity semiconductor materials and metals by ermal decomposition of a gaseous compound of said materials, comprising the steps of arranging conductive carrier bodies in electrical current branches in a multi-phase a.c. system, then passing an equal amount of electrical current through each of the branches so as to heat the carrier bodies to deposition temperature, regulating the current in each of the branches so that the same magnitude of current flows through each branch.

REFERENCES:
patent: 2981605 (1961-04-01), Rummel
patent: 3053638 (1962-09-01), Reiser
patent: 3171755 (1965-03-01), Reuschel et al.
patent: 3941900 (1976-03-01), Stut et al.

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