Process for producing semiconductor device having porous regions

Details Process for producing semiconductor device having porous regions Process for producing semiconductor device having porous regions

1997-04-28

1999-10-19

Tsai, Jey

Semiconductor device manufacturing: process

Formation of electrically isolated lateral semiconductive...

Total dielectric isolation

438960, H01L 2176

Patent

active

059703610

ABSTRACT:
Disclosed are a semiconductor device having a porous member as an active region, the porous member comprising a plurality of porous regions having different structures or compositions; and a process for producing a semiconductor device, comprising a step of modifying partially a non-porous substrate, and a subsequent step of making the substrate porous.

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