Process for producing purified solutions of blocked polyhydroxys

Details Process for producing purified solutions of blocked polyhydroxys Process for producing purified solutions of blocked polyhydroxys

1998-05-08

1999-08-31

Baxter, Janet

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Radiation sensitive composition or product or process of making

523328, 524317, 524364, 524475, G03C 173

Patent

active

059452510

ABSTRACT:
1. A process for preparing a purified solution of blocked polyhydroxystyrene resin in reaction/photoresist solvent, comprising the steps of:

REFERENCES:
patent: 5473045 (1995-12-01), Sizensky et al.
patent: 5565304 (1996-10-01), Honda
patent: 5618655 (1997-04-01), Davidson
patent: 5817444 (1998-10-01), Sato et al.

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