Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making named article
Patent
1992-01-07
1992-09-15
McCamish, Marion E.
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Making named article
430323, 430397, 430 5, G03C 500, G11B 372
Patent
active
051477637
ABSTRACT:
A process for producing a stamper having a roller form is disclosed. The process includes the steps of: forming a layer of a photoresist on a stamper substrate having a roller form; causing a flexible exposure mask having a predetermined pattern to substantially contact the roller stamper substrate and exposing the roller stamper substrate to light by the medium of the exposure mask; subjecting the photoresist layer to development thereby to form on the stamper substrate a pattern of the photoresist corresponding to the pattern of the exposure mask; and forming on the stamper substrate an unevenness pattern corresponding to the pattern of the photoresist.
REFERENCES:
patent: 4778747 (1988-12-01), Ohta et al.
patent: 4888266 (1989-12-01), Lacotte et al.
Canon Kabushiki Kaisha
McCamish Marion E.
Rosasco S.
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