Process for producing metrological structures particularly usefu

Details Process for producing metrological structures particularly usefu Process for producing metrological structures particularly usefu

1992-09-01

1993-09-21

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156626, 156651, 156657, 1566611, 156662, 156345, 437228, H01L 21306, B44C 122, C03C 1500, C23F 100

Patent

active

052465390

ABSTRACT:
Process for producing metrological structures particularly useful for analyzing the accuracy of instruments for measuring alignment on processed substrates. The process produces metrological structures which have measurement profiles defined on substrate regions and on industrially-processed regions on a single wafer. The measurement profiles define statistical distributions which can be detected by measurement machines in order to analyze the measurement accuracy of the machines themselves.

REFERENCES:
patent: 4650744 (1987-03-01), Amano
patent: 5002902 (1991-03-01), Watanabe
patent: 5017512 (1991-05-01), Takagi
patent: 5100508 (1992-03-01), Yoshida et al.
patent: 5114531 (1992-05-01), Fukushima et al.

Affiliated with

Also associated with

Rating

Process for producing metrological structures particularly usefu does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Process for producing metrological structures particularly usefu, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Process for producing metrological structures particularly usefu will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1047060