Process for producing luminescent silicon nanoparticles

Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate – Fluid growth from gaseous state combined with subsequent...

Reexamination Certificate

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C977S774000, C977S814000

Reexamination Certificate

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10796442

ABSTRACT:
A process for producing brightly photoluminescent silicon nanoparticles with an emission spanning the visible spectrum is disclosed. In one aspect, the process involves reacting a silicon precursor in the presence of a sheath gas with heat from a radiation beam under conditions effective to produce silicon nanoparticles and acid etching the silicon nanoparticles under conditions effective to produce photoluminescent silicon nanoparticles. Methods for stabilizing photoluminescence of photoluminescent silicon nanoparticles are also disclosed.

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