Process for producing ink jet recording head

Details Process for producing ink jet recording head Process for producing ink jet recording head

2006-05-23

2006-05-23

Trinh, Minh (Department: 3729)

Metal working

Method of mechanical manufacture

Fluid pattern dispersing device making, e.g., ink jet

C029S415000, C029S417000, C029S890090, C216S027000, C347S024000

Reexamination Certificate

active

07047642

ABSTRACT:
An ink jet recording head and a process for producing the same, and an ink jet recording apparatus are provided that improve the printing performance and also improve the production efficiency. A conjugated body73formed by conjugating silicon wafers50and58is cut, whereby nozzles22are opened, and cutting into head chip units is carried out. At this time, deep grooves84are formed on the surface of the silicon wafer58by anisotropic etching, and they are penetrated by etching on the opposite side. Grooves90are formed on the silicon wafer50by using the thus penetrated deep grooves84as a mask.

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