Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent
1987-06-23
1988-09-20
Niebling, John F.
Chemistry: electrical and wave energy
Processes and products
Coating, forming or etching by sputtering
20419212, C23C 1440
Patent
active
047723700
ABSTRACT:
A method for producing quasi-crystalline films by direct vapor deposition through sputtering is provided. The method is applicable to all alloys which can be converted to quasi-crystalline structure by melt spinning.
REFERENCES:
patent: 4173606 (1979-11-01), Stoy et al.
patent: 4511614 (1985-04-01), Greeson et al.
patent: 4533441 (1985-08-01), Gamblin
patent: 4621031 (1986-11-01), Scruggs
Brian Chapman, Glow Discharge Processes, John Wiley & Sons, New York, 1980, p. 201-203.
Englert Alvin
Leader William
Niebling John F.
The United States of America as represented by the Secretary of
Tockman Albert
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