Process for producing conductors for integrated circuits using p

Details Process for producing conductors for integrated circuits using p Process for producing conductors for integrated circuits using p

1984-01-13

1985-08-06

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156652, 156656, 156657, 1566611, 204192E, 427131, 427132, 427259, B44C 122, C03C 1500, C03C 2506, C23F 102

Patent

active

045334315

ABSTRACT:
The invention relates to a process for producing conductors for integrated circuits using planar technology.
According to this process, on a substrate is deposited an insulating material coating. A masking sheet is deposited on the insulating material coating and this sheet is cut to form windows corresponding to the conductors to be obtained. The insulating material sheet is etched facing the windows. A conductive material is deposited on the cut masking sheet. The masking sheet and the conductive material covering it are removed. This process consists of choosing a masking sheet having a first coating covering the insulating material coating and a second masking coating covering the first coating. The first coating is cut chemically facing the windows and after cutting the second masking coating, the edges of the first coating on the periphery of the windows are eroded by chemical cutting.
Application to the production of planar integrated circuits.

REFERENCES:
patent: 4224361 (1980-09-01), Romankiw
patent: 4391849 (1983-07-01), Bischoff
Journal of the Electrochemical Society, vol. 125, No. 6, Jun. 1978, pp. 860-865, entitled Electrochemical Aspects of the Beveling of Sputtered Permalloy Films by J. J. Kelly and G. J. Koel.

Affiliated with

Also associated with

Rating

Process for producing conductors for integrated circuits using p does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Process for producing conductors for integrated circuits using p, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Process for producing conductors for integrated circuits using p will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-510973