Process for producing color filter using alignment marks

Details Process for producing color filter using alignment marks Process for producing color filter using alignment marks

1986-10-30

1988-10-11

Brammer, Jack P.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Readily visible image formation

430 7, 430 22, G03C 500

Patent

active

047771178

ABSTRACT:
A process for producing a color filter having plural number of colorant layer patterns by repeating, for each of a plural number of starting materials for colorant layer, the steps of subjecting a substrate having a photoresist laminated thereon to pattern exposure to effect patterning of said photo-resist, laminating a colorant layer from said photoresist above and removing the layer of said photoresist having said colorant layer laminated thereon by dissolution to form a colorant layer pattern, comprises forming an alignment mark on said substrate with the same starting material as a first colorant layer pattern simultaneously with formation of said first colorant layer pattern and performing registration of the mask during formation of a second colorant layer pattern et seq. through said alignment mark.

REFERENCES:
patent: 4343878 (1982-08-01), Chiang
patent: 4423127 (1983-12-01), Fujimura
patent: 4482625 (1984-11-01), Namiki et al.
patent: 4522903 (1985-06-01), Heiart et al.
patent: 4536420 (1985-08-01), Amendola et al.
patent: 4564584 (1986-01-01), Fredericks et al.

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